Deposition of diamond/β-SiC/cobalt silicide composite interlayers to improve adhesion of diamond coating on WC-Co substrates by DC-Plasma Assisted HFCVD

► Diamond/β-SiC/cobalt silicide composite films were first synthesized by HFCVD. ► The films are composed of diamond, β-SiC and cobalt silicides (Co2Si, CoSi). ► Diamond and β-SiC crystallites are grown simultaneously. ► The interlayers can improve the adhesion of diamond coating on WC-Co substrates.