On-machine measurement of a cylindrical surface with sinusoidal micro-structures by an optical slope sensor

This paper describes the measurement of a cylindrical surface with sinusoidal micro-structures over a large area on a diamond turning machine. The sinusoidal micro-structures, which are fabricated on the periphery surface of a cylinder by the fast tool servo-based diamond turning, are superposition of periodic sine-waves along the cylinder axis and the cylinder circumference with amplitudes of 100 nm and wavelengths of 100 μm, respectively. An optical two-dimensional (2D) slope sensor with a multi-spot light beam is developed for measurement of the 2D local slopes of the sinusoidal micro-structured surface. A cylindrical lens is employed in the sensor for removing the influence of the curvature of the cylinder surface. Experiments of fabrication and measurement of the sinusoidal micro-structured surface on an ultra-precision diamond turning machine are carried out.