کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9670533 1450403 2005 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Ab-initio simulations on growth and interface properties of epitaxial oxides on silicon
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Ab-initio simulations on growth and interface properties of epitaxial oxides on silicon
چکیده انگلیسی
The replacement of SiO2 by so-called high-k oxides is one of the major challenges for the semiconductor industry to date. Based on electronic structure calculations and ab-initio molecular dynamics simulations, we are able to provide a consistent picture of the growth process of a class of epitaxial oxides around SrO and SrTiO3. The detailed understanding of the interfacial binding principles has also allowed us to propose a way to engineer the band-offsets between the oxide and the silicon substrate.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 80, 17 June 2005, Pages 402-407
نویسندگان
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