Keywords: پرتوی واکنش پذیر; Reactive sputtering; XPS; Oxidation state; Vanadium oxide; I-V;
مقالات ISI پرتوی واکنش پذیر (ترجمه نشده)
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Keywords: پرتوی واکنش پذیر; Titanium nitride; Thin film; Electrical resistivity; Reactive sputtering; Thermal annealing; X-ray diffraction; Conduction diffusion barrier;
Keywords: پرتوی واکنش پذیر; Reactive sputtering; In-vacuo target transfer; XPS; Aluminum; Tantalum;
Keywords: پرتوی واکنش پذیر; Amorphous carbon; Carbon-titanium nanocomposite; Microstructure; Optical property; Electrical property; Reactive sputtering;
Keywords: پرتوی واکنش پذیر; Gas pulsing; Tunable tungsten oxide; Reactive sputtering; Tunable composition; Metal-to-semiconductor transition;
Keywords: پرتوی واکنش پذیر; Amorphous silicon nitride; Inductively coupled plasma; Reactive sputtering; Emissive prove;
Keywords: پرتوی واکنش پذیر; ion beam sputtering; ribbon-beam; reactive sputtering; thin film; linear deposition; film uniformity; deposition rate; high vacuum deposition; magnetic films.;
Keywords: پرتوی واکنش پذیر; Reactive sputtering; Cylindrical magnetron target; Laser; Reflection; Roughness;
Keywords: پرتوی واکنش پذیر; Model; Reactive sputtering; Hot target; Oxide; Evaporation;
Keywords: پرتوی واکنش پذیر; Gas flow sputtering; Reactive sputtering; Yttria stabilized zirconia; Thermal barrier coatings; Substrate temperature; Morphology; Microstructure; Grain orientation; Thermal cycling; Failure mechanism;
Keywords: پرتوی واکنش پذیر; MoN; Vacancies; Transition metal nitrides; Sputter deposition; Reactive sputtering; Thin films;
Keywords: پرتوی واکنش پذیر; Reactive sputtering; Laser reflectometry; Roughness evolution; Target poisoning;
Keywords: پرتوی واکنش پذیر; Gas flow sputtering; Reactive sputtering; Yttria stabilized zirconia; Thermal barrier coatings; Substrate temperature; Bias voltage; Morphology; Microstructure; Grain orientation;
Keywords: پرتوی واکنش پذیر; Tungsten/tungsten oxide; Periodic multilayers; Reactive sputtering; Gas pulsing; Electrical conductivity;
Keywords: پرتوی واکنش پذیر; Reactive sputtering; Hysteresis; Modeling; Thin film
Keywords: پرتوی واکنش پذیر; Molybdenum oxide; Thin film; MoO2; MoO3; Reactive sputtering
Keywords: پرتوی واکنش پذیر; Transparent Conductive Oxide; Indium Oxide; Hydrogen; Reactive Sputtering; Light Trapping.;
Keywords: پرتوی واکنش پذیر; Oxynitride; Perovskite; Thin films; Reactive sputtering; Epitaxy; Dielectric
Keywords: پرتوی واکنش پذیر; Thin films; Aluminium oxide; Magnetron; Reactive sputtering; Pulsed sputtering;
Keywords: پرتوی واکنش پذیر; Carbon; Nickel; Annealing temperature; Reactive sputtering;
Keywords: پرتوی واکنش پذیر; Tungsten oxide; Nanocluster; Reactive sputtering; Cluster formation; Gas aggregation; XPS; SEM; AFM;
Keywords: پرتوی واکنش پذیر; Ab initio calculations; Semiconducting materials; Nitrides; Reactive sputtering;
Keywords: پرتوی واکنش پذیر; Iron oxynitride; Reactive sputtering; Reactive gas pulsing process; X-ray diffraction; Transmission electron microscopy; Mössbauer spectrometry;
Keywords: پرتوی واکنش پذیر; Titanium nitride; Reactive sputtering; Resistivity; Annealing; X-ray photoelectron spectroscopy; X-ray diffraction;
Keywords: پرتوی واکنش پذیر; Iron nitride thin films; Reactive sputtering; Thermal stability;
Keywords: پرتوی واکنش پذیر; Reactive sputtering; Modeling; RSD2013; Racetrack; Thin films;
Keywords: پرتوی واکنش پذیر; Gas flow sputtering; Reactive sputtering; Yttria stabilized zirconia; Thermal barrier coatings; Substrate bias; Oxygen flow rate; Morphology; Microstructure; Grain orientation; Thermal cycling;
Keywords: پرتوی واکنش پذیر; Reactive sputtering; Cr–C–N coatings; Wear resistance; Friction coefficient
Keywords: پرتوی واکنش پذیر; Thin films; Perovskite; Reactive sputtering; Lanthanum titanium oxide; Epitaxy; Dielectric; High frequency
Keywords: پرتوی واکنش پذیر; Tungsten oxide; Thin films; Periodic multilayers; Reactive sputtering; Gas pulsing; Electrical properties
Keywords: پرتوی واکنش پذیر; Silicon oxynitride; Reactive sputtering; Optical emission spectroscopy; Reactive gas pulsing process (RGPP);
Keywords: پرتوی واکنش پذیر; Vanadium oxide; Reactive sputtering; Duty cycle; Composition; Electrical properties
Keywords: پرتوی واکنش پذیر; Direct current magnetron sputtering; High power impulse magnetron sputtering; Reactive sputtering; Amorphous chromium carbide; Solid lubricant; Contact resistance;
Keywords: پرتوی واکنش پذیر; Reactive sputtering; Hysteresis; Elevated pressure; Modeling;
Keywords: پرتوی واکنش پذیر; Reactive sputtering; Gas separation; Hysteresis;
Keywords: پرتوی واکنش پذیر; Aluminum-doped Zinc Oxide; Reactive sputtering; X-ray diffraction
Structure and magnetization of Co4N thin film
Keywords: پرتوی واکنش پذیر; Co4N thin films; Reactive sputtering; Magnetization;
In situ growth of CuSbS2 thin films by reactive co-sputtering for solar cells
Keywords: پرتوی واکنش پذیر; Reactive sputtering; In situ growth; CuSbS2; Thin films; Photovoltaics;
Properties optimization with high nitrogen content doping for InGaZnO films deposited by reactive sputtering with a GaN-embedded cermet target
Keywords: پرتوی واکنش پذیر; IGZO; Nitrogen doping; Reactive sputtering; Cermet target; Electrical property;
Effect of Gd-doping on electrochromic properties of sputter deposited WO3 films
Keywords: پرتوی واکنش پذیر; Electrochromic; Gd-doped WO3 thin films; Reactive sputtering;
Characteristics of carbonânickel nanocomposite thin films prepared by reactive sputtering under different radio frequency powers and their applications for electronic devices
Keywords: پرتوی واکنش پذیر; Amorphous carbon; Carbonânickel nanocomposite; Microstructure; Optical properties; Electrical properties; Reactive sputtering;
Enhanced thermal stability and thermochromic properties of VOx-based thin films by room-temperature magnetron sputtering
Keywords: پرتوی واکنش پذیر; VOx-based thin films; Reactive sputtering; Rapid thermal annealing; Thermaochromic performance; Thermal stability;
Influence of oxygen content on structure and material properties of reactively sputtered Al-Ge-O-N thin films
Keywords: پرتوی واکنش پذیر; Reactive sputtering; Al-Ge-O-N; Optical properties; Hard coatings; Thermal stability;
Silver (Ag) incorporated Cu2ZnSnS4 thin film for improved optical and morphological properties
Keywords: پرتوی واکنش پذیر; (Ag,Cu)2ZnSnS4; Reactive sputtering; Cu2ZnSnS4; Thin film.;
Nanostructured Cu2ZnSnS4 (CZTS) thin film for self-powered broadband photodetection
Keywords: پرتوی واکنش پذیر; Cu2ZnSnS4; Nanostructure; Self-powered; Visible and near-infrared; Reactive sputtering;
Influence of hysteresis effect on properties of reactively sputtered TiAlSiN films
Keywords: پرتوی واکنش پذیر; TiAlSiN films; Reactive sputtering; Hysteresis effect; Plasma characteristics; Mechanical properties;
Influence of the oxygen consumption on the crystalline structure of titanium oxides thin films prepared by DC reactive magnetron sputtering
Keywords: پرتوی واکنش پذیر; Reactive sputtering; Film pumping speed; Titanium suboxides;
Influence of frequency and C2H2 flow on growth properties of diamond-like carbon coatings with AlCrSi co-doping deposited using a reactive high power impulse magnetron sputtering
Keywords: پرتوی واکنش پذیر; Diamond-like carbon; AlCrSi co-doping; Reactive sputtering; Reactive high power impulse magnetron sputtering; Frequency; Surface properties; Wear; Hardness;
Post-deposition annealing of thin RF magnetron sputter-deposited VO2 films above the melting point
Keywords: پرتوی واکنش پذیر; Vanadium dioxide; Annealing; Metal-insulator transition; RF magnetron sputtering; Reactive sputtering; Phase diagram;
Ab initio-guided development of super-hard Mo-Al-Cr-N coatings
Keywords: پرتوی واکنش پذیر; Superhardness; Mo-Al-Cr-N; Reactive sputtering; Nitrogen vacancies; Mechanical properties;