Effects of acetylacetone on the preparation of sol–gel derived (Ca0.8Sr0.2)TiO3 dielectric thin films

Electrical properties and microstructures of (Ca0.8Sr0.2)TiO3 thin films prepared by sol–gel method using acetylacetone modifier on n-type Si(100) substrates at different molar ratio of acetylacetone to titanium alkoxide and annealing temperatures have been investigated. The diffraction pattern showed that the deposited films exhibited a polycrystalline microstructure. All films exhibited (Ca0.8Sr0.2)TiO3 peak orientation perpendicular to the substrate surface and the grain size with the increase in the molar ratio of acetylacetone to titanium alkoxide and annealing temperature. The dependence of the physical and electrical characteristics on various molar ratio of acetylacetone to titanium alkoxide and annealing temperatures were also investigated.

► (Ca0.8Sr0.2)TiO3 films at various annealing and acetylacetone additions were investigated.
► The intensity of the peak (Ca0.8Sr0.2)TiO3 increased as the annealing and addition increased.
► Optimum films possess a εr value of 100, a loss factor of 0.15 and a current density of 8.6 × 10− 9 A/cm2.