Characteristics of microstructure and mechanical properties of Sc films as a function of substrate temperature

► The effect of substrate temperature (100-650 °C) on the Sc films is studied. ► Sc films at lower temperatures are oxidized easier than those at higher temperatures. ► Easier oxidation is attributed to the smaller grain size and lower diffusibility of oxygen in Sc film. ► Hardness and modulus are mainly influenced by the grain size and degree of oxidation.