Modifying residual stress and stress gradient in LPCVD Si3N4 film with ion implantation Fulltext Access 6 Pages 2006
Thermoelectric microstructures of Bi2Te3/Sb2Te3 for a self-calibrated micro-pyrometer Fulltext Access 6 Pages 2006
A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators Fulltext Access 6 Pages 2006
Fabrication of a disposable biochip for measuring percent hemoglobin A1c (%HbA1c) Fulltext Access 6 Pages 2006
Direct hemoglobin measurement on a centrifugal microfluidic platform for point-of-care diagnostics Fulltext Access 6 Pages 2006
Behavior of an optical sensor based on non-ideal silicon capacitors: From amplification to generation Fulltext Access 6 Pages 2006
A new high-temperature thermal sensor based on large-grain polysilicon on insulator Fulltext Access 6 Pages 2006
A self-excited micro cantilever biosensor actuated by PZT using the mass micro balancing technique Fulltext Access 6 Pages 2006
Fabrication and characteristics of the suppressed sidewall injection magnetotransistor using a CMOS process Fulltext Access 6 Pages 2006
Simultaneous thermal conductivity and diffusivity sensing in liquids using a micromachined device Fulltext Access 6 Pages 2006
Stability of wafer level vacuum encapsulated single-crystal silicon resonators Fulltext Access 6 Pages 2006
Piezoelectric properties of polycrystalline AlN thin films for MEMS application Fulltext Access 6 Pages 2006
Carbon nanotube-based transparent thin film acoustic actuators and sensors Fulltext Access 6 Pages 2006
Preparation of micrometric silver filaments for polymeric pressure sensors Fulltext Access 6 Pages 2006
The evaluation of Young's modulus and residual stress of copper films by microbridge testing Fulltext Access 6 Pages 2006
The influence of calcium doped ZnO films on Love wave sensor characteristics Fulltext Access 6 Pages 2006
A design method for out-of-plane structures by multi-step magnetic self-assembly Fulltext Access 6 Pages 2006
Czochralski silicon detectors irradiated with 24GeV/c and 10Â MeV protons Fulltext Access 6 Pages 2006
Electric field distribution and charge transport properties in diode-like CdTe X-ray detectors Fulltext Access 6 Pages 2006
The NA60 vertex telescope for particle tracking in heavy-ion and proton–nucleus collisions Fulltext Access 6 Pages 2006
Application-specific architectures of CMOS monolithic active pixel sensors Fulltext Access 6 Pages 2006
Full-size monolithic active pixel sensors in SOI technology—Design considerations, simulations and measurements results Fulltext Access 6 Pages 2006
The direct measurement of the signal charge behavior in pnCCDs with subpixel resolution Fulltext Access 6 Pages 2006
CMOS integrated pixel array for low-level radiation detection using 'time compression' parametric amplification Fulltext Access 6 Pages 2006
High-rate X-ray spectroscopy using a Silicon Drift Detector and a charge preamplifier Fulltext Access 6 Pages 2006
The continuous spinning current (CSC) stress sensor method for the extraction of two stress components in an offset compensated manner Fulltext Access 6 Pages 2006
Test beam results of a proton irradiated Czochralski silicon strip detector Fulltext Access 6 Pages 2006
Epitaxial silicon detectors for particle tracking—Radiation tolerance at extreme hadron fluences Fulltext Access 6 Pages 2006
Tuning wettability and getting superhydrophobic surface by controlling surface roughness with well-designed microstructures Fulltext Access 6 Pages 2006
Study on a PZT-actuated diaphragm pump for air supply for micro fuel cells Fulltext Access 6 Pages 2006
A piezoelectric micro-actuator with a three-dimensional structure and its micro-fabrication Fulltext Access 6 Pages 2006
Temperature dependence of piezoelectric properties of sputtered AlN on silicon substrate Fulltext Access 6 Pages 2006
Fabrication of three-dimensional microstructure using maskless gray-scale lithography Fulltext Access 6 Pages 2006
Integrated chip-size antennas for wireless microsystems: Fabrication and design considerations Fulltext Access 6 Pages 2006
A new adaptive automated feedback system for Barkhausen signal measurement Fulltext Access 6 Pages 2006
Improved multi-sensor for force measurement of pre-stressed steel cables by means of the eddy current technique Fulltext Access 6 Pages 2006
Gas sensing properties of ZnO thin films prepared by microcontact printing Fulltext Access 6 Pages 2006
Effect of Joule-heating annealing conditions on giant magnetoimpedance of Co-rich amorphous ribbons Fulltext Access 6 Pages 2006
Electrical stimuli-induced deformation and material properties of electro-active polymer Nafion117 Fulltext Access 6 Pages 2006
Microstructural, dielectric and piezoelectric properties of low-temperature sintering Pb(Co1/2W1/2)O3–Pb(Mn1/2Nb2/3)O3–Pb(Zr,Ti)O3 ceramics with the addition of Li2CO3 and Bi2O3 Fulltext Access 6 Pages 2006
A high-accuracy, high-speed interface circuit for differential-capacitance transducer Fulltext Access 6 Pages 2006
Pulsed magnetic flux leakage techniques for crack detection and characterisation Fulltext Access 6 Pages 2006
A high displacement ultrasonic actuator based on a flexural mechanical amplifier Fulltext Access 6 Pages 2006
A very simple compensation technique for bent V-grooves in KOH etched (1 0 0) silicon when thin structures or deep etching are required Fulltext Access 6 Pages 2006
A novel architecture of implementing wavelet transform and reconstruction processor with SAW device based on MSC Fulltext Access 6 Pages 2006
An optical voltage and current sensor with electrically switchable quarter waveplate Fulltext Access 6 Pages 2006
High sensitive touch sensor with piezoelectric thin film for pipetting works under microscope Fulltext Access 6 Pages 2006
Evaluation of Cr-doped yttrium aluminum garnet crystals for hybrid fiber-optic thermometer application Fulltext Access 6 Pages 2006
Sinewave generation with on board DAC non-linearity compensation using a ΣΠapproach Fulltext Access 6 Pages 2006
Temperature measurements of microhotplates using fluorescence thermometry Fulltext Access 6 Pages 2006
Applying autonomous sensor systems in logistics—Combining sensor networks, RFIDs and software agents Fulltext Access 6 Pages 2006
Coin-size coiled-up polymer foil thermoelectric power generator for wearable electronics Fulltext Access 6 Pages 2006
A laser release method for producing prototype flexible retinal implant devices Fulltext Access 6 Pages 2006
Digital sensors design based on universal frequency sensors interfacing IC Fulltext Access 6 Pages 2006
Colour filtering in a-SiC:H based p-i-n-p-i-n cells: A trade-off between bias polarity and absorption regions Fulltext Access 6 Pages 2006
Effects of gas type on the sensitivity and transition pressure of integrated thermal flow sensors Fulltext Access 6 Pages 2006
Two- and three-dimensional microcoil fabrication process for three-axis magnetic sensors on flexible substrates Fulltext Access 6 Pages 2006
Using thermally printed transparency as photomasks to generate microfluidic structures in PDMS material Fulltext Access 6 Pages 2006
Thermal simulation of micromachined bridge and self-heating for uncooled VO2 infrared microbolometer Fulltext Access 6 Pages 2006
Fabrication of short and thin silicon cantilevers for AFM with SOI wafers Fulltext Access 6 Pages 2006
Neural network based identification of Preisach-type hysteresis in piezoelectric actuator using hysteretic operator Fulltext Access 6 Pages 2006
Measurement of longitudinal piezoelectric coefficient of film with scanning-modulated interferometer Fulltext Access 6 Pages 2006