Formation of a heavily B doped diamond layer using an ion implantation technique

In this report, we present a study on lattice and electronic structures of B doped layers formed using B implantation into diamond. Boron layers were produced using the multiple-energy B ion implantation (total dose: 2.1 × 1015 to 1.7 × 1017 cm− 2) into type IIa diamond at ~ 400 °C. Optical absorption and Hall effects were measured in the range of 80−1000 K for investigating the change of the lattice and electronic structures with the B concentration in diamond. The p-type carrier conduction was observed at 80−1000 K in all the samples. While a lightly B doped sample displays typical semiconductive, temperature-dependent valence-band conduction, heavily B doped samples have the very weak or almost zero temperature dependence of the carrier concentrations, resistivity and Hall mobility in this temperature region, suggesting characteristics of a p-type degenerate semiconductor. In such heavily doped samples, broad optical absorption bands, most likely corresponding to Drude absorption originating from free holes, were observed. The minimum resistivity and the sheet resistance at room temperature among the samples were 1.4 mΩcm and 56 Ω/□, respectively. These results indicate that very low-resistive p-type degenerate semiconducting layers were produced, preserving diamond lattice (preventing graphitization), despite high-dose ion irradiation.