Surface modifications of amorphous hydrogenated carbon films submitted to carbon tetrafluorine plasma treatment

► Fluorination of a-C:H films was achieved by CF4 plasma treatment. ► LEIS was used for the characterization of the outermost surface layer. ► AFM measurements show an increase of the surface roughness for longer time treatment. ► The fluorine content at the outermost surface layer explains the surface hydrophobicity.