Raman micro-spectroscopy as a tool to measure the absorption coefficient and the erosion rate of hydrogenated amorphous carbon films heat-treated under hydrogen bombardment

► We study in this work the erosion of heat treated a-C:H under atomic H bombardment. ► We present a fast way to determine the erosion rate & absorption coefficient of a-C:H films using Raman. ► Our model is based on relative Raman band intensities and the Beer's absorption law. ► We controlled our results using ellipsometry measurements. ► Our work can be used in a systematic study aiming at better understanding chemical erosion.