کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10133578 | 1645598 | 2018 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Piezoelectric MEMS with multilayered Pb(Zr,Ti)O3 thin films for energy harvesting
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Piezoelectric MEMS with multilayered Pb(Zr,Ti)O3 thin films for energy harvesting Piezoelectric MEMS with multilayered Pb(Zr,Ti)O3 thin films for energy harvesting](/preview/png/10133578.png)
چکیده انگلیسی
This study aims to report the design of high-performance piezoelectric MEMS energy harvesters using a full batch MEMS-fabrication process with a Si proof mass and multilayered Pb(Zr,Ti)O3 (PZT) thin films without bonding of a proof mass and/or bulk piezoelectric ceramics. These devices contain sputtered multilayered PZT thin films with internal metal electrodes as a thick energy-conversion layer. The thickening of the piezoelectric layer by multilayer sputter deposition technique enabled the batch fabrication of high-performance piezoelectric MEMS harvesters. These fabricated device with the footprint of 10âÃâ10 mm2 was found to provide a high output power of 53.7 μW per gravitational acceleration. These results are expected to be useful for the future development of alternatives to batteries for autonomous sensor systems.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 281, 1 October 2018, Pages 229-235
Journal: Sensors and Actuators A: Physical - Volume 281, 1 October 2018, Pages 229-235
نویسندگان
Kensuke Kanda, Shota Hirai, Takayuki Fujita, Kazusuke Maenaka,