کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10347372 | 699186 | 2005 | 15 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Minimizing total weighted tardiness on a single batch process machine with incompatible job families
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی کامپیوتر
علوم کامپیوتر (عمومی)
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چکیده انگلیسی
The diffusion step in semiconductor wafer fabrication is very time consuming, compared to other steps in the process, and performance in this area has a significant impact on overall factory performance. Diffusion furnaces are able to process multiple lots of similar wafers at a time, and are therefore appropriately modeled as batch processing machines with incompatible job families. Due to the importance of on-time delivery in semiconductor manufacturing, we focus on minimizing the total weighted tardiness in this environment. The resulting problem is NP-Hard, and we decompose it into two sequential decision problems: assigning lots to batches followed by sequencing the batches. We develop several heuristics for these subproblems and test their performance.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Computers & Operations Research - Volume 32, Issue 2, February 2005, Pages 327-341
Journal: Computers & Operations Research - Volume 32, Issue 2, February 2005, Pages 327-341
نویسندگان
Imelda C. Perez, John W. Fowler, W.Matthew Carlyle,