کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
10347372 699186 2005 15 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Minimizing total weighted tardiness on a single batch process machine with incompatible job families
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر علوم کامپیوتر (عمومی)
پیش نمایش صفحه اول مقاله
Minimizing total weighted tardiness on a single batch process machine with incompatible job families
چکیده انگلیسی
The diffusion step in semiconductor wafer fabrication is very time consuming, compared to other steps in the process, and performance in this area has a significant impact on overall factory performance. Diffusion furnaces are able to process multiple lots of similar wafers at a time, and are therefore appropriately modeled as batch processing machines with incompatible job families. Due to the importance of on-time delivery in semiconductor manufacturing, we focus on minimizing the total weighted tardiness in this environment. The resulting problem is NP-Hard, and we decompose it into two sequential decision problems: assigning lots to batches followed by sequencing the batches. We develop several heuristics for these subproblems and test their performance.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Computers & Operations Research - Volume 32, Issue 2, February 2005, Pages 327-341
نویسندگان
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