Fabrication of split-ring resonators by tilted nanoimprint lithography

► In this study, an efficient fabrication technique for large area Negative-index materials has been demonstrated. ► Periodic metallic split-ring arrays are fabricated based on the combination of tilted nanoimprint lithography and nanotransfer imprinting. ► The feature size of the split-rings can be adjusted to 240 nm by scaling down the nanopillars of original imprinting mold. ► This approach provides an alternative method for the large-area fabrication of SRRs.