White light interferometry for surface profiling with a colour CCD

► A white light interferometer system using a single-chip colour CCD for 3-D surface profiling on micro-samples is demonstrated. ► The proposed method makes the data acquisition and phase evaluation procedures as simple as in case of single wavelength method. ► The use of colour CCD camera in white light interferometry makes the measurement faster, simple. ► And cost effective, which is very much useful for industrial applications.