Wavelength scanning interferometry using a Ti:Sapphire laser with wide tuning range

► Customization of Ti:S laser allows high speed WSI scans of over 100 nm. ► Automatic exposure compensation for variation of laser power with wavelength. ► Nonlinear tuning curve due to laser mode hops corrected through resampling algorithms. ► Depth resolution improved>100x, approaching theoretical limit for scans up to 37 nm.