Far-field modeling of Moiré interferometry using scalar diffraction theory

► We proposed a far-field model of Moiré Interferometer (MI) based on scalar diffraction formulation. ► Wave propagation in far field is solved analytically for a single frequency grating structure. ► Electrical field solution of the grating structure is linear in the spatial frequency domain. ► Far-field electrical field and the interferogram are calculated using the mode deposition method. ► A series of MI interferograms is obtained from the Finite Element Analysis (FEA) deformation field.