کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10409071 | 893935 | 2007 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Silicon microphone with wide frequency range and high linearity
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
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چکیده انگلیسی
This paper reports a silicon microphone with a wide frequency range and high linearity and its novel fabrication process. The transducer has a monolithic structure and is simply fabricated from a bonded silicon wafer. A frequency range from 30Â Hz to 20Â kHz, which covers the audio frequency, and a total harmonic distortion less than 0.3% at a sound pressure level of 20Â Pa (120Â dBSPL) are obtained. The measured sensitivity of the transducer is â52Â dBV/Pa (1Â kHz), which is in good agreement with the calculated value.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 135, Issue 2, 15 April 2007, Pages 420-425
Journal: Sensors and Actuators A: Physical - Volume 135, Issue 2, 15 April 2007, Pages 420-425
نویسندگان
Yoshinori Iguchi, Masahide Goto, Masakazu Iwaki, Akio Ando, Kenkichi Tanioka, Toshifumi Tajima, Futoshi Takeshi, Susumu Matsunaga, Yoshinobu Yasuno,