کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
10409137 893935 2007 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Measurement of static and dynamic friction coefficients of sidewalls of bulk-microfabricated MEMS devices with an on-chip micro-tribotester
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Measurement of static and dynamic friction coefficients of sidewalls of bulk-microfabricated MEMS devices with an on-chip micro-tribotester
چکیده انگلیسی
A kind of micro-tribotester has been designed and fabricated to evaluate the static and dynamic friction coefficients on lateral contact surfaces of single crystal silicon material based MEMS devices. In this tester two disconnected comb shuttles, frictional pair and force sensors are all integrated on a single chip. One shuttle in the system acts as loading structure and the other one moves back and forth to force the friction pair to reciprocate. The tribotester was fabricated with the standard bulk-fabrication and bonding processes. Finally, dynamic and static frictional coefficients of the fabricated structure are measured with the micro-tribotester under microscope. The tested static frictional coefficient is 0.9 and dynamic frictional coefficient is in the range of 0.24-0.35. The friction measurement results of the tester have revealed some characteristics of tribological behaviors in MEMS.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 135, Issue 2, 15 April 2007, Pages 863-869
نویسندگان
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