Varifocal liquid lenses with integrated actuator, high focusing power and low operating voltage fabricated on 200Â mm wafers

Compared to previous liquid lenses, very compact devices (≤6 mm × 6 mm × 0.7 mm) working at a reduced supply voltage (<25 V) are demonstrated. Wave front measurements indicate an optical power change of 8 m−1 at 22 VRMS that can be further improved. The lenses were fabricated on 200 mm wafers using standard microelectronics processes that make our solution a promising small outline, low voltage and low cost candidate for auto-focus devices in camera phones.