کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10409398 | 894011 | 2006 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A micro ultrasonic motor using a micro-machined cylindrical bulk PZT transducer
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
In this paper, a micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. The cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8Â mm and a height of 2.2Â mm, was developed as stator transducer for traveling wave type ultrasonic motor. The transducer was made of lead zirconate titanate (PZT) bulk ceramics, and formed by micro machining, Ni plating and laser beam cutting process. Using this stator transducer, we have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0Â mm and a height of 5.9Â mm. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 127, Issue 1, 28 February 2006, Pages 131-138
Journal: Sensors and Actuators A: Physical - Volume 127, Issue 1, 28 February 2006, Pages 131-138
نویسندگان
Takefumi Kanda, Akira Makino, Tomohisa Ono, Koichi Suzumori, Takeshi Morita, Minoru Kuribayashi Kurosawa,