Dual-axis MEMS mirror for large deflection-angle using SU-8 soft torsion beam

We present design methodology, fabrication process and characterization of a dual-axis MEMS galvano-mirror with double gimbal structure. In the device, soft torsion beams are made of the photosensitive epoxy resin, SU-8, in order to obtain large-deflection angle for small driving power. In this paper, we present characteristics of the inner and outer mirrors for dynamic and static operation, and also test results for stability. The tilt angle of the mirror for applied static current is about 0.1°/mA. Maximum deflection angle at resonant operation was measured to be over than ±40°.