A micro-machining-based digital variable optical attenuator

A micro-machining-based digital MOEMS variable optical attenuator is described. The device implements an electromagnetically actuated shutter interposed in a fiber collimator gap and is capable of digitally adjusting optical attenuation and latching during power-off. The device is fabricated using non-silicon micro-machining technology. The performance of the digital VOA is measured and compared with calculated results. The device has less than 0.3 dB insertion loss, greater than 40 dB dynamic range, less than 0.1 dB polarization-dependent loss and low wavelength-dependent loss with <0.2 dB over the C-band (1535-1565 nm).