Self-sensing tapping mode atomic force microscopy

We demonstrate self-sensing tapping mode using commercially available, low-stress, piezoelectric cantilevers with sharp, integrated, silicon tips. Previous work has been limited by stress in the cantilevers, thickness and size of the cantilevers, un-optimized electrical trace design, and/or a lack of a probing tip. Tests indicate amplitude resolution with self-sensing to be as good or better than optical detection, and sensitivities up to twice as good, with the same type cantilever. A tapping mode image of an evaporated gold film and force curves that compare optical and self-sensing detection methods are presented.