SOI-based high performance multi-subpart profile grating mirror

In this study, a SOI-based high performance multi-subpart profile grating mirror (MPGM) is proposed and fabricated. It is shown that with the multi-subpart profile and strongly modulated thin grating layer, the MPGM experimentally demonstrated an ultra broadband reflection spectrum from 1.21 to1.62 µm, very high reflectivity (R>97%), and low sensitivity to incident angle at the range of −12.3°<θ<+13.1°.