کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10409562 | 894085 | 2005 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Sensing of liquid level at micron resolution using self-excited millimeter-sized PZT-cantilever
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Composite resonant millimeter-sized piezoelectric cantilevers were fabricated and their mass change sensitivity was evaluated using liquid evaporation experiments. The cantilever sensor was immersed to 1 mm depth in two volatile fluids, and one non-volatile fluid. Deionized water and 50% ethanol-water solution showed a resonant frequency change of 19 ± 1 and 23 ± 1 Hz/min, respectively. The cantilever liquid level change sensitivity (Ï) was determined as 0.26 ± 0.01 μm/Hz. Experimental measurement of liquid level change of deionized water at room temperature and humidity was found to be 5.0 ± 0.1 μm/min, and is in good agreement with first principles model prediction of 5.5 μm/min. We have modeled the added mass effects as proportional to displaced liquid mass. Such a model agrees with experimental results for immersion depths of less than 1 mm. The model provides a method for determining cantilever's spring constant and the added mass coefficient. The significance of the results we report is that millimeter-sized piezoelectric-actuated cantilevers have the sensitivity for measuring micron-level liquid level changes.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 122, Issue 2, 26 August 2005, Pages 326-334
Journal: Sensors and Actuators A: Physical - Volume 122, Issue 2, 26 August 2005, Pages 326-334
نویسندگان
Gossett A. Campbell, Raj Mutharasan,