A microfabricated electromagnetic linear synchronous motor

A miniature linear synchronous motor was designed, fabricated and tested. Actuation was achieved through interaction of traveling magnetic wave, generated by linear array of microcoils on the stator, and permanent magnets on the rotor. Two configurations of the motor were investigated. One with a single hand-assembled permanent magnet on rotor and corresponding array of multiturn microcoils; the other, a fully microfabricated rotor with embedded array of screenprinted permanent magnets and a linear array of serpentine microcoils on the stator. Motion of the rotor was constrained by dovetail microjoints. A numerical model was developed for modeling and dynamic control. The motor was tested under various operating conditions with both open- and closed-loop control. The motors showed reliable translation over 6 cm travel with accuracy limited by the feedback system.