کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10409663 | 894101 | 2005 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Optimization of design and fabrication for micromachined true time delay (TTD) phase shifters
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Distributed techniques have been widely employed as a solution to obtain wide band circuits at microwave and millimeter wave band. This paper presents five different designs for true-time delay (TTD) phase shifters that are based on characteristic impedance of 75, 65 and 50 Ω coplanar waveguide (CPW) distributed microelectromechanical systems (MEMS) transmission line (DMTL), which are loaded with different designs and number of shunt capacitive switches. The TTD phase shifters are fabricated on a 675 μm high resistivity silicon (Si) wafer using surface micromachining process. The design operates up to Ku band with a measured return loss below â15 dB and an average loss of 2.3 dB/phase shift of 250° at 20 GHz. The TTD phase shifters have wide applications for high-performance of microwave and millimeter-wave integrated circuits.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 119, Issue 2, 13 April 2005, Pages 446-454
Journal: Sensors and Actuators A: Physical - Volume 119, Issue 2, 13 April 2005, Pages 446-454
نویسندگان
W. Palei, A.Q. Liu, A.B. Yu, A. Alphones, Y.H. Lee,