کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10409709 | 894104 | 2005 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A dual-mode surface encoder for position measurement
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: A dual-mode surface encoder for position measurement A dual-mode surface encoder for position measurement](/preview/png/10409709.png)
چکیده انگلیسی
A surface encoder incorporating an angle grid and two two-dimensional (2D) slope sensors is presented. The angle grid is a plate inscribed with periodic sinusoidal waves in the X and Y directions as a position reference, and the position of the plate is detected uniquely using two slope-sensor units. One of the slope sensors is fitted with a beam scanning function to probe and read the angle grid. The system provides two measurement modes: a high-speed measurement mode that measures the XYθz position at a fast sampling rate, and a multiple degree-of-freedom (DOF) measurement mode that measures the XYθxθyθz position at a lower sampling rate by probe scanning. The linearity, cross-talk and resolution of a prototype encoder system are evaluated, and the system is shown to be acceptable for application as a precise dual-mode measurement scheme for a planar stage.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 117, Issue 1, 3 January 2005, Pages 95-102
Journal: Sensors and Actuators A: Physical - Volume 117, Issue 1, 3 January 2005, Pages 95-102
نویسندگان
W. Gao, S. Dejima, S. Kiyono,