Characteristics comparison of planar stages using repulsive and attractive type of surface actuator principle

Presently, a driving technology capable of realizing a high accuracy and a large dynamic range concurrently and guaranteeing super cleanness has been requested in spheres spanning the whole range of an industry. But the stringent performance targets are very difficult to achieve with conventional driving methods due to friction, backlash, high inertia, elasticity of joints, and non-linearity in the inter-linking links and transmission dynamics. To cope with the severe targets, the authors suggest precision stages using the principle of a surface actuator, which realizes the overall spatial and relatively large planar motion with its moving part isolated from the stator. Specially as a principle of a next generation positioning system, the potential of magnetic suspension technology is discussed by comparing various basic technologies applied to the surface actuator. And the entire development procedures of the systems are described in detail, including primary principles, real implementation, and performance evaluation.