Multisensor chip for gas concentration monitoring in a flowing gas mixture

In this paper, the monitoring of gas concentration of a flowing gas with a semiconductor gas sensor is faced. In this kind of devices, the flow rate has a significant effect on the gas sensors' output signal. One way to obtain reliable measurements is the simultaneous monitoring of flow rate and gas concentration. In this way, the integration of a flow sensor in a set of semiconductor gas sensors on a multisensor silicon chip is proposed. The design and the technological compatibilization required to address the approach are presented and the viability of this proposal is demonstrated by measuring two different gas atmospheres at several flow rates.