Simulation and design of piezoelectric microcantilever chemical sensors

To obtain an application specific optimum design parameters and predict the cantilever performance ahead of actual fabrication, finite element analysis (FEM) simulations using CoventorWare (a MEMS design and simulation program) were performed. Analytical models of multi-layer cantilevers as well as simulation concept are described. Both mechanical and piezoelectric simulation results are carried out. The cantilever structures are analyzed and fabrication process steps are proposed.