کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
10412317 894885 2005 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Reliability of anodically bonded silicon-glass packages
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Reliability of anodically bonded silicon-glass packages
چکیده انگلیسی
In this paper, reliability of anodically bonded packages between silicon and borosilicate glass wafers has been investigated. The effects of certain accelerated environmental tests such as thermal cycling; thermal shock and boiling test on bonding quality are evaluated. The bonding strength is measured using an in-house tensile tester and fracture mainly occurs inside the glass wafer other than along the interface, indicating the robustness of the bond. The experiments conducted show that fast cooling after bonding results in high thermal stress in glass, which deteriorated the mechanical performances. Thermal cycling and thermal shock can help relax thermal stress, while boiling does do harm to bonding strength owing to their different effect on microstructures. Finally, the fracture interfaces are examined and analyzed by scanning electron microscopy (SEM).
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 120, Issue 1, 29 April 2005, Pages 291-295
نویسندگان
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