Integrable silicon microfluidic valve with pneumatic actuation

Integration of microvalves into complex fluidic circuits and systems requires those that are built using simple, standard microfabrication techniques. These techniques can be combined to build a valve capable of driving high pressures, and that can be extended to a wide range of applications. No bonding between different materials is needed, and the resulting device is made entirely from one piece. In this paper, the design, fabrication, and testing of the described valve are discussed. In addition, a mechanical model of its behavior is presented.