A micromachined gas sensor based on a catalytic thick film/SnO2 thin film bilayer and a thin film heater

The sensor realized low power consumption and fast thermal response owing to small heat capacity. This fast thermal response decreased the time required to detect CO and thus decreased the time to operate the sensor. The average power consumption was less than 0.03 mW when operated every 2 min. The sensor sensitively detected CO by high-and-low periodic operation of the heater, while the sensitivity to H2, the interfering gas used, was relatively suppressed.