کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10412842 | 895266 | 2005 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Micro-bead of nano-crystalline F-doped SnO2 as a sensitive hydrogen gas sensor
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی آنالیزی یا شیمی تجزیه
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Gas sensor system was designed and fabricated using micro-electro mechanical system (MEMS) technology, coating the nano-crystalline F-doped SnO2-based material as a micro-bead on a silicon substrate with Pt electrode and heater by screen-printing method. Gas sensing properties of the sensor were tested against combustible gases like H2, CO, CH4, C3H8. Nano-crystalline F-doped SnO2 micro-sensor showed maximum sensitivity for hydrogen gas and little sensitivities for other gases at a heater voltage of 0.7Â V. The present micro-sensor showed higher sensitivity and better stability for hydrogen gas in comparison to commercially available SnO2, and is a low energy consuming portable sensor module that can be mass-produced with nano-crystalline gas sensing material using MEMS technology.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators B: Chemical - Volume 109, Issue 2, 14 September 2005, Pages 264-269
Journal: Sensors and Actuators B: Chemical - Volume 109, Issue 2, 14 September 2005, Pages 264-269
نویسندگان
Chi-Hwan Han, Sang-Do Han, Ishwar Singh, Thierry Toupance,