Investigation of microstructure and piezoelectric properties of Zr- and Sm-doped PbTiO3 nanostructured thin films derived by sol-gel technology

Pb1.0175Sm0.05(Zr0.52Ti0.48)O3 (PSZT), PbSm0.05TiO3 (PST), Pb(Zr0.52Ti0.48)O3 (PZT) and heterostructure PST/PSZT thin films were deposited by sol-gel technique and investigated with emphasis on suitability for specific applications. Macroscopic piezoelectric properties are investigated by laser Doppler vibrometry, and surface microstructure and local piezoelectric properties by piezoresponse atomic force microscopy. Sm-doped films have smooth microstructure with grain 60-90 nm and piezoelectric coefficient d33 7-62 pm/V. Poling induced large polarization imprint in these films. PZT film exhibits high d33 (93 pm/V in unpoled and 419 pm/V in poled state), but is susceptible to aging in unpoled state. Local piezoelectric hysteresis loop is obtained, and polarization patterning is demonstrated for PZT film.