Application of nanocrystalline FeHfN soft magnetic films to power inductors

► The planar power inductors are successfully integrated with the Fe-Hf-N films. ► The FeHfN films can efficiently enhance the inductance of the power inductors. ► The saturation current of the sandwich power inductors further exceeds 2 A. ► The FeHfN films possess potential applications in miniaturization of inductors.