High-frequency micro-inductor fabricated on NiCuZn ferrite substrates

We have fabricated the planar micro-inductors directly on a NiCuZn ferrite substrate. Due to NiCuZn's high resistivity, no insulator is required between the coil and the magnetic film; an advantage in terms of ease fabricated and stray capacitance reduction. Sandwiched inductors show improvement of inductance from 16 to 80 nH at 1 MHz compared with the coreless inductors, and the increment of inductance is larger than the sandwiched thin film inductor.