کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
11023585 1701263 2018 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Design and research on large displacement bidirectional MEMS stage with interlock mechanism
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Design and research on large displacement bidirectional MEMS stage with interlock mechanism
چکیده انگلیسی
The design, fabrication and characterization of a large displacement bidirectional MEMS stage is presented in this paper. The V-shape electro-thermal actuator, micro lever, pawl and slider are investigated respectively. With 11 V driven voltages, these basic components can generate 15 mN output force and realize pulling, disengaging and reengaging to move the stage forward and backward smoothly (1 mm displacement in bi-direction). The rack and interlock mechanism formed by the pawl and slider make the device to have the features of linear output displacement, low power consumption, input signal recognition and displacement sustaining. SOI wafer is introduced in the fabrication process, and the 1.2 × 3.5 mm2 movable plate can be actuated successfully.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 283, 1 November 2018, Pages 26-33
نویسندگان
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