Main Effects of Lattice Parameter in Ba0.65Sr0.35TiO3 Thin Films

Barium Strontium Titanate (BST) thin films have been proven as a material for various advance integrated circuit applications.This paper presents the relationship between spin coating speed, heat treatment time, and annealing temperature in response to the lattice parameter in ferroelectric Barium Strontium Titanate (BST). The investigation was done using a full factorial design of experiment (DOE). Analysis was done quantitatively by plotting the main effects graphs. The results suggest that The results suggest that the lattice parameter being larger at low level of spin coating speed. Lattice parameter increases as the heat treatment time decreases. Furthermore, the lattice parameter is inversly proportional to the annealing temperature.