Helium detection using a planar integrated micro-mass spectrometer

A planar integrated micro-mass spectrometer (PIMMS) is presented, which shifts the limit of the measurable range from m/z 12–1206 down to m/z 3–301 compared to results obtained earlier. This shift is achieved by doubling the width of the electrodes of the synchronous ion shield (SIS) mass analyzer. This is confirmed by the detection of helium with the micro-mass spectrometer, which allows its use for helium leak detection. The introduction of a micro-channel plate improves the sensitivity of the PIMMS to <400 ppm.

We present the results of modifications done in the structure of our planar integrated micro-mass spectrometer. Thanks to these the mass scan region is shifted to lower masses, so that helium can be measured.Figure optionsDownload high-quality image (62 K)Download as PowerPoint slide