Facile and efficient preparation of high-performance REBa2Cu3O7−x superconducting films through a novel fluorinated solution route

► An advanced low-fluorine solution was used to prepare REBCO films. ► High-efficiency fabrication of high-performance REBCO films was realized. ► Fluorides and oxides were formed as intermediate phase in the precursor films. ► Formation and removal mechanism of fluorides were discussed.