Preparation of Nanoporous Ti/TiO2 Layers Deposition by RF-magnetron Sputtering/Sol-Gel Combustion Procedure for Dye-sensitized Solar Cell

Nanoporous Titanium (Ti) / Titanium oxide (TiO2) film electrodes were fabricated by a combined radio frequency-sputtering (RFS) / Sol-gel combustion (SGC) method and investigated with respect to its photo-anode properties of transparent conductive oxide-less dye-sensitized solar cells (TCO-less DSCs). The porous Ti layer can collect electrons from the TiO2 layer and allows the ionic diffusion of I-/I3− through the hole. The porous Ti layer with low sheet resistance (∼1.7Ω/sq.) can be prepared by substrate temperature 250oC under RF power 300 W and Ar gas pressure 8 mTorr. The Ti/TiO2 layers prepared by combined RFS/SGC method show the good impedance characteristics. The efficiency (η) of prepared TCO-less DSCs sample is 5.73% [fill factor (ff): 0.76, open circuit voltage (Voc): 0.71 V, short-circuit current density (Jsc): 10.61 mA/cm2].