کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1513228 1511208 2012 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Water Vapor Delivery to Vacuum Process for Photovoltaic Applications
موضوعات مرتبط
مهندسی و علوم پایه مهندسی انرژی انرژی (عمومی)
پیش نمایش صفحه اول مقاله
Water Vapor Delivery to Vacuum Process for Photovoltaic Applications
چکیده انگلیسی

Oxide films are an important aspect of modern solar cells, providing passivation layers that increase cell efficiency. Uniformity of these layers is essential and affected by the distribution of gas species within the furnace. As the wafer load has gone up and wafer-to-wafer spacing has gone down, uniformity has become a concern. To address this, manufacturers are turning to sub-atmospheric furnaces. This in turn requires delivery of liquid source chemicals into sub-atmospheric pressure.This study describes tests performed on a Steamer to determine the ability of that device to deliver a set steam flow rate in a controlled manner. Multiple tests under atmospheric and vacuum pressure conditions show that the Steamer can reliably deliver steam to a sub-atmospheric process.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Energy Procedia - Volume 27, 2012, Pages 592-597