75 V Space-Efficiency Trench Power MOSFET

In this work, a trench power MOSFET (U-MOS) with space-efficiency is investigated. Reduction of cell pitch is an effective approach to diminish the total specific on-resistance (Rds,sp) of U-MOS, with a realization of embedded source contact and protuberant gate. And the influence of some key parameters on U-MOS static performances are simulated and analyzed by TCAD-Process. Then the optimum parameters of a 75 V rated space-efficiency U-MOS for automotive applications with 94.59 mΩ·mm2 specific on-resistance is given.