Effects of Oxygen Flow on the Infrared Switching Properties of Vanadium Oxide Thin Films

Vanadium oxide (VOX) thin films have been deposited on glass substrates with different oxygen flows (3, 3.2, and 3.6 sccm) by means of magnetron sputtering process. We found that for different oxygen flows, the change of the infrared transmittance can be reached as high as 57%, the transmittance contrast factor can be reached as high as 88%,and the phase transition temperature is decreased to 54 oC, it is an ideal material for application in energy-efficient windows. According to the X-ray diffraction results of the thin films, we observed that with the increase of oxygen flow, VO2 (200) diffraction peak decreases obviously.