Atmospheric Components and Dopant Carry-Over Influence During Laser Ablation

In order to improve the efficiency of multi-crystalline (mc)-silicon solar cells, laser ablation as a non-contact tool is highly suitable for various processes. Apart from the laser and scanning parameters frequently reported in the liter-ature, other factors exist upon which the observable results of laser ablation depend. In addition to laser and scanning parameters, the influence of various atmospheres on the laser ablation process is investigated in this work. The laser edge isolation process is used to demonstrate these effects. The impact on the dopant concentration in the generated laser groove is investigated using the shunt resistance of the solar cells. From these investigations the most suitable laser is determined as well as ambient parameters for the ablation of mc-silicon.