Experimental studies and computer simulation of the preparation of nanoporous silicon-carbide membranes by chemical-vapor infiltration/chemical-vapor deposition techniques

Preparation of asymmetric nanoporous silicon-carbide membranes using chemical-vapor infiltration/chemical-vapor deposition (CVI/CVD) is described. We use macroporous SiC disks and tubes as supports, and tri-isopropylsilane as the precursor. Experimental data for the permeation and selectivity of the membranes are presented. We also develop two dynamic models to describe the preparation of the membranes. The models are shown to provide accurate predictions for the experimental data for the permeation characteristics of the membranes, as a function of the preparation conditions.