Design of high-bandwidth high-precision flexure-based nanopositioning modules

This paper presents the design of a single degree-of-freedom high-bandwidth high-precision nanopositioning module for high-throughput nanomanufacturing applications. Compared with widely used lumped-compliance mechanisms (using notch-flexure hinges) and distributed-compliance mechanisms (using compliant flexure beams), this nanopositioning module adopts a hybrid compliant-notch-flexure-based structure. This flexure design decouples the performance requirements for the structural bandwidth and parasitic accuracy that are correlated in the lumped-compliance mechanisms and distributed-compliance mechanisms. The parallelogram hybrid compliant-notch-flexure-based structure enables simultaneous achievement of a higher structural bandwidth and a smaller parasitic motion. The behavior of the nanopositioning module is analyzed theoretically with respect to its design parameters and performance objectives. Finite element analysis is adapted to study the dynamic responses and parasitic displacement of the designed nanopositioning module. The results from the theoretical and FEA analysis demonstrate the effectiveness of the hybrid compliant-notch-flexure design over commonly used lumped-compliance mechanisms and distributed-compliance mechanisms, especially when a high structural bandwidth is required for high-throughput nanomanufacturing applications.