کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1697973 1519276 2015 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Vibration cancellation of semiconductor manufacturing robots
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی کنترل و سیستم های مهندسی
پیش نمایش صفحه اول مقاله
Vibration cancellation of semiconductor manufacturing robots
چکیده انگلیسی

The semiconductor manufacturing industry is having a critical upgrade. To meet the new standards of silicon wafer production and processing, vibration control of wafer handling robots must break new grounds because conventional methods have reached their limits. This paper presents a direct vibration cancellation method for semiconductor manufacturing robots. With a vibrotactile transducer on the wafer holder, the vibration can be significantly reduced without adversely affecting the tracking accuracy of the wafer handling motion. Several control strategies are analyzed and combined to obtain the best performance. Experimental validation shows a vibration reduction of 47% in energy and 30% in amplitude.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Manufacturing Letters - Volume 4, April 2015, Pages 6–9
نویسندگان
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